(sc) a component of many equipment systems on which the wafer is placed. Frequently made of high-purity graphite.

A flat silicon plate on which wafers are held during thermal deposition processes.

One who undertakes anything; specifically, a godfather; a sponsor; a guardian.

A susceptor is a material used for its ability to absorb electromagnetic energy. This energy is typically radiofrequency or microwave radiation used in industrial heating processes, and also occasionally in microwave cooking. The name is derived from susceptance, an electrical property of materials that measures their tendency to convert electromagnetic energy to heat.