About us
Definitions for "PECVD"
Keywords:  cvd, plasma, wafer, vapor, enhanced
Related Terms: Chemical vapor deposition, Cvd, Physical vapor deposition, Ion implantation, Cmp, Sputtering, Silane, Haber process, Pvd, Exothermic reaction, Catalytic, Amorphous silicon, Explosion, Exothermic, Selective catalytic reduction, Doping, Reactor, Pyrolysis, Gassing, Reactive, Reduction, Photolysis, Dopant, Endothermic reaction, Photochemical reaction, Chemical etching, React, Blowing agent, Oxidation, Exotherm, Chemisorption, Inert, Oxidation-reduction, Fumes, Carrier gas, Moderator, Epitaxy, Born-haber cycle, Chemical treatment, Catalytic cracking, Combustion, Outgassing, Chemical reaction, Inert gas, Chain reaction, Thin film, Cracking, Chemical property, Oxidation catalyst
A gas-phase chemical deposition technique involving plasma electrons that make the process operable at low temperatures. Conventional CVD processes require higher substrate temperatures in order to break existing chemical bonds and release the desired species from the gas.
unaxis.com
Plasma Enhanced Chemical Vapor Deposition. This machine can deposit thin films on silicon, GaAs, and other substrates in the Nanolab
delporte.org
Plasma enhanced CVD (see PaCVD)
ionbond.com
View 4 more results
Keywords:  passivation, final, layer
most often as a final passivation layer.
pspglobal.com