Lithographie, galvanoformung und abformung, the German words for Lithography, Electroplating and Molding. Liga is a type of HARM suitable for making parts with depths significantly greater than lateral dimensions from metals, metal alloys, plastics or ceramics. The Liga process uses synchrotron radiation to create a pattern in an X-ray resist, usually PMMA. The use of synchrotron radiation allows lateral feature sizes that are as small as a few microns in dimension, and straight, smooth vertical side walls that can be as tall as several millimeters. Once the PMMA is exposed, it is chemically developed and used as a mold for electroforming metal or metal alloys.
German-language acronym of lithography (LI=lithogafie) electroplating (G=Galvanoformung) and molding (A=Abformung). The LIGA technique represents all these different processes required in microfabrication.
An acronym from the German words for lithography, electroplating and molding, a micromachining technique used to create very tall, straight-walled structures for Microsystems.
A micromachining technology in which X-ray radiation is used in the production of high-aspect ratio, precision microstructures. LIGA parts are typically 2D extruded metal shapes.
german acronym for X-ray lithography (X-ray LIthographie), electrodeposition (Galvanoformung) and molding (Abformtechnik)
A type of High Aspect Ratio Micromachining (HARM); it is a German acronym for Lithographie, Galvanofomung, Abformung, meaning Lithography, Electroforming, Molding.
LIGA (German acronym for X-ray lithography (X-ray Lithographie), Electroplating (Galvanoformung), and Molding (Abformung)) is a process in microtechnology that was developed in the early 1980s Becker EW et al, Production of Separation-Nozzle Systems for Uranium Enrichment by a Combination of X-Ray Lithography and Galvanoplastics, Naturwissenschaften 69, 520-523 (1982) by a team under the leadership of Erwin Willy Becker and Wolfgang Ehrfeld at the Institute for Nuclear Process Engineering (Institut für Kernverfahrenstechnik IKVT) present name/successor institution: Institute for Microstructure Technology (Institut für Mikrostrukturetechnik) IMT at the Karlsruhe Nuclear Research Center present name: Forschungszentrum Karlsruhe (Karlsruhe Research Center). LIGA was one of the first major techniques to allow on-demand manufacturing of high-aspect-ratio structures (in other words, very skinny and tall) compared to traditional photolithographic techniques, with lateral dimensions below one micrometre. This capability is important in the fabrication of MEMS devices.
