chemical formula SiH4, silane is a pyrophoric, toxic gas with a TLV of 5ppm, and is combustible in the range of ~1-96%. Silane is widely used to deposit silicon containing films in a variety of CVD reactions.
A gas that readily decomposes into silicon and hydrogen, silane is often used to deposit silicon-containing compounds. It also reacts with ammonia to form silicon nitride, or with oxygen to form silicon dioxide.
Silane is a chemical compound with chemical formula SiH4. It is the silicon analogue of methane. At room temperature, silane is a gas, and is pyrophoric â€” it undergoes spontaneous combustion in air, without the need for external ignition.