Microsystems that are composed of both mechanical and electronic parts. Most MEMS systems today are based on silicon, are manufactured using integrated circuit (IC) batch-processing techniques, and follow the deposit-and-etch methods found in IC fabrication. While MEMS devices such as sensors and actuators have been around some time, it is only in the past few years that MEMS design and fabrication have begun to venture out of mostly automotive and military applications and into the telecommunications and computer markets.
Micro-electrical-mechanical systems allow sensors, electronics, and actuators to be batch fabricated on a single chip. MEMS can perform extremely delicate operations such as drilling holes with bits finer than the human eye can see unaided.
Micro Electro Mechanical System – A microscopic device with both electrical and mechanical functionality, which is manufactured in a batch process. Less formally, the term MEMS is often used to describe batch-fabricated mechanical devices even when there is no electrical functionality or system (i.e. a single mechanical component), or interchangeably with MST or micromachines. For more information, see what are MEMS.
Microelectromechanical systems are devices and machines fabricated using techniques generally used in microelectronics, often to integrate mechanical or hydraulic functions etc. with electrical functions.
Micro Electro Mechanical System. Microlithography: The science and art of building a mask pattern on top of a substrate (e.g. quartz glass) and then transferring this pattern into another substrate. This process is repeated many times to form an integrated circuit, MEMS, etc. Microlithography: Is a manufacturing process for producing highly accurate, microscopic, two-dimensional patterns in a photosensitive resist material. These patterns are replicas of a master pattern on a durable photomask, typically made out of a thin patterned layer of chromium on a transparent glass plate.
Microelectromechanical systems (MEMS) are a class of micron-scale devices made using semiconductor processes that integrate electronic and mechanical functions. Texas Instrument's DLPâ„¢ projection element is one example of MEMS. Iridigm has also made a direct-view reflective display with MEMS technology. MEMS are also used for sensors, such as accelerometers and optical switches.
Micro-Electro-Mechanical Systems are micro- or nanometer-scale machines that have physical dimensions suitable for, among other things, optical light beam switching by means of shutters or deflectable micro mirrors. MEMS and MOEMS are often made with standard IC wafer fab techniques.
Micro-Electro Mechanical Systems. A technology that combines computers with tiny mechanical devices (such as sensors, valves or gears) for integration with integrated circuits. MEMS devices refer to mechanical components that are one micrometer (one millionth of a meter) in size.
Micro-electro-mechanical systems. A technology dealing with building mechanical structures on silicon wafers using IC processing techniques. MEMS sensors already developed are primarily used for pressure and acceleration measurement.
Microelectromechanical systems. A term primarily used in the United States, it refers to machines with moving parts smaller than a human hair that contain both electrical and mechanical components on silicon. Also referred to as Microsystems, microstructures, microstructure technology (MST) and mechatronics.
Micro Electro Mechanical Systems. Through lithography and thin film systems / thin film technology, micro electro mechanical systems (MEMS) provide the possibility to produce two- and three-dimensional objects and structures in the order of magnitude of a few micrometers only. Micro electro mechanical systems combine the methods of micro electronics, micro mechanics, micro fluidics, and micro optics, but also developments of computer sciences, biotechnology, and nanotechnology, by recombining developments and structures of all these areas into new systems. Well-known example are optical sensors in wireless mouses, or modern printers' bubble-jet print heads combining micrometer-fine jets with heating elements, partly even with their own intelligence in the print head. Further examples of application are acceleration sensors for the triggering of airbags, revolution rate sensors for roll-over bars, AFM (atomic force microscope) cantilevers, instruments of keyhole surgery like endoscope systems, or chemical sensors for food monitoring.
MicroElectoMechanical Systems. Tiny mechanical devices built onto semiconductor chips, measured in micrometers. They are used to make pressure, temperature, chemical and vibration sensors, light reflectors and switches as well as accelerometers for airbags, vehicle control, pacemakers and games, just to name a few applications. Sometimes the term MEMS is used interchangeably with nanotechnology since they both deal with microminiaturized objects, but they are vastly different. MEMS deals in devices measured in micrometers, while nanotechnology deals with manipulating atoms at the nanometer level.